| HIGH VACUUM CARBON COATER | |
|---|---|
| Chamber size | 150mm Ø Variable height, 165mm - 250mm |
| Evaporation source | Bradley type (6.15mm Ø rods) Heavy duty stainless steel construction |
| Evaporation supply | Microprocessor based Feedback loop controlled with remote current/voltage sensing Safety interlocked Variable, 135A max. with over-current protection |
| Sample stage | Static table holds 12 SEM ½" stubs Height adjustment through 60mm Optional rotary-planetary-tilt stage |
| Analogue metering | Vacuum, dual range Atm - 0.001mb 1x10-3mb - 5x10-6mb Current, 0- 200A |
| Control method | Automatic evaporation control using programmed voltage and timer Full manual override with pulsed or continuous operation Digital timer, 1 - 30 seconds Digital voltage setting, 0.1 - 5.5V Automatic vent |
| Thickness monitoring | Optional, MTM-10 only |
| PUMPING SYSTEM | |
| Configuration | Turbo/rotary pump combination |
| Pumping speed | 80 litres/sec |
| Pumpdown time | 1.5 min. to 1x10-4mb |
| Ultimate pressure | 5x10-6mb |
| Desktop system | Rotary pump is mounted on desktop compatible anti-vibration table All metal vacuum coupling system |
| THICKNESS MONITOR | |
| MTM-10 | Microprocessor based 4 digit display with push button zero 5 times/sec. display update rate 6 MHz crystal with life-time check |
| Thickness range | 0 - 999.9nm |
| Resolution | Better than 0.1nm |
| Density range | 0.50 - 30.00gm/cm3 |
| Tooling factor range | 0.25 - 8.00 |
| SERVICE REQUIRED | |
| Supply | 100 - 120 or 200 - 240 VAC, 50/60Hz (specify on order) |
| Power | 1200 VA max |
| SYSTEM DIMENSIONS | |
| Size | Width 600mm, Depth 600mm, Height 360mm |
| Weight | 45 kg |
