| AUTOMATIC SPUTTER COATER | |
|---|---|
| Chamber size | 120mm Ø x 120mm high |
| Sputter head | Low voltage planar magnatron Quick target change Wrap-around dark-space shield |
| Sputter target | Gold fitted as standard (Au/Pd or Pt optional) 57mm Ø x 0.1mm thick |
| Sputter supply | Microprocessor based Safety interlocked Current control independent of vacuum Digitally selectable current (10, 20, 30 or 40mA) |
| Sample stage | Holds 12 SEM ½" stubs Height adjustment through 60mm |
| Analogue metering | Vacuum, Atm - 0.001mb Current, 0 - 50mA |
| Control method | Automatic operation of gas purge and leak functions Automatic process sequencing Full manual override Digital timer, 5 - 300 seconds with pause Automatic vent |
| Thickness monitoring | Optional, MTM-10 |
| Thickness controll | Optional, MTM-20 with termination facility |
| Dimensions | Width 420mm, Depth 295mm, Height 287mm |
| Weight | 11 kg |
| Power | 45 VA max (excluding rotary pump) |
| PUMPING SYSTEM | |
| Rotary pump | High speed, direct drive 2-stage |
| Desktop system | 3.0/3.6 m3/hr (50/60Hz)+Pumpdown time to 0.1mb is 20/25 sec |
| Dimensions | Width 330mm, Depth 215mm, Height 210mm, 270mm (with filter) |
| Weight | 15 kg |
| Power | 130VA |
| SERVICE REQUIRED | |
| Supply | 100 - 120 or 200 - 240 VAC, 50/60Hz (specify on order) |
| Power | 175 VA max |
| Argon gas | Purity, min. 99.9% Pressure, regulated 7 - 8 psi (0.5 - 0.6 bar) Hose connection, 6.0mm |
